au.\*:("WOODARD OC")
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AUTOMATIC REGISTRATION IN AN ELECTRON-BEAM LITHOGRAPHIC SYSTEM.DAVIS DE; MOORE RD; WILLIAMS MC et al.1978; SOLID STATE TECHNOL.; USA; DA. 1978; VOL. 21; NO 8; PP. 61-67; BIBL. 3 REF.Article
AUTOMATIC REGISTRATION IN AN ELECTRON-BEAM LITHOGRAPHIC SYSTEM.DAVIS DE; MOORE RD; WILLIAMS MC et al.1977; I.B.M. J. RES. DEVELOP.; U.S.A.; DA. 1977; VOL. 21; NO 6; PP. 498-505; BIBL. 8 REF.Article
